The Preparation Process and Applications of Zirconium Target

What is a Zirconium Target?

• The zirconium target is a processed product made from high-purity zirconium material. It is silver-white in color, with a density of 6.49g/cm³ and a melting point of 1852°C.
  

  
  

• The zirconium target has characteristics of high purity, high density, high-temperature resistance, and corrosion resistance.

  
  

• High-purity zirconium targets can prevent impurities from affecting the performance of the film; high-density zirconium targets can improve the adhesion and density of the film.

  
  

• High-temperature resistance and corrosion resistance ensure the stability and longevity of the zirconium target during the preparation process.

The Preparation Process of the Zirconium Target

• Prepare zirconium material: Cut zirconium rods into small pieces, removing surface oxides;

  
  

• Prepare the furnace: Place the zirconium material in the furnace, add a protective gas (usually argon);

  
  

• Raise the furnace temperature: Heat the furnace to the melting point of the zirconium material (approximately 1852°C);

  
  

• Lower the furnace temperature: After the zirconium material is completely melted, lower the furnace temperature to let the zirconium material gradually solidify;

  
  

• Remove the zirconium target: Once the furnace has cooled, remove the zirconium target for subsequent processing and handling.

It is important to ensure the purity of the atmosphere during the preparation process to avoid contamination of the zirconium material. Additionally, temperature and melt flow need to be controlled during preparation to obtain a high-quality zirconium target.

Applications of Zirconium Targets

• Zirconium targets are mainly used for preparing thin films of metal oxides, metals, and alloys, which have important applications in semiconductor, optoelectronic, chemical, and life science fields.

• In the semiconductor field, zirconium targets can be used to prepare gate electrodes and metal interconnect layers in MOSFET devices.

• In the optoelectronic field, zirconium targets can be used to prepare cathodes in electron beam evaporators and optical coatings.

Why Choose Aulister's Zirconium Targets?

Aulister's zirconium targets offer excellent corrosion resistance, heat resistance, and biocompatibility, making them a high-quality material suitable for many fields, including protective coatings, electronic products, medical devices, and decorative paints. Zirconium targets can be produced through methods such as powder metallurgy, vacuum melting, and hot isostatic pressing (HIP) to achieve the required purity, density, and uniformity. Aulister has advanced technology to produce high-quality zirconium targets.